Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors

A convenient process for generating large‐scale, horizontally aligned arrays of pristine, single‐walled carbon nanotubes (SWNTs) is described. The approach uses guided growth, by chemical vapor deposition (CVD), of SWNTs on miscut single‐crystal quartz substrates. Studies of the growth reveal import...

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Veröffentlicht in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2005-11, Vol.1 (11), p.1110-1116
Hauptverfasser: Kocabas, Coskun, Hur, Seung-Hyun, Gaur, Anshu, Meitl, Matthew A., Shim, Moonsub, Rogers, John A.
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Sprache:eng
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Zusammenfassung:A convenient process for generating large‐scale, horizontally aligned arrays of pristine, single‐walled carbon nanotubes (SWNTs) is described. The approach uses guided growth, by chemical vapor deposition (CVD), of SWNTs on miscut single‐crystal quartz substrates. Studies of the growth reveal important relationships between the density and alignment of the tubes, the CVD conditions, and the morphology of the quartz. Electrodes and dielectrics patterned on top of these arrays yield thin‐film transistors that use the SWNTs as effective thin‐film semiconductors. The ability to build high‐performance devices of this type suggests significant promise for large‐scale aligned arrays of SWNTs in electronics, sensors, and other applications. All lined up: Aligned arrays of single‐walled carbon nanotubes (SWNTs) can be formed over large areas by guided growth through chemical vapor deposition on commercially available, single‐crystal quartz substrates (as depicted in the picture). Electrodes and dielectrics patterned on top of these arrays yield high‐performance thin‐film transistors that use the SWNTs as effective thin‐film semiconductors.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.200500120