Asymmetrical optical lenslet array realized by spatial light modulator for measuring toroidal surfaces

The Shack-Hartmann wavefront sensor (SHWS) recently has been extensively researched for optical surface metrology due to its extendable dynamic range compared with interferometry technique. In this paper, we proposed to use a digital SHWS to measure toroidal surfaces, which are widely used in many o...

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Veröffentlicht in:Applied Optics 2008-12, Vol.47 (36), p.6778-6783
Hauptverfasser: Zhao, L P, Bai, N, Li, X
Format: Artikel
Sprache:eng
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Zusammenfassung:The Shack-Hartmann wavefront sensor (SHWS) recently has been extensively researched for optical surface metrology due to its extendable dynamic range compared with interferometry technique. In this paper, we proposed to use a digital SHWS to measure toroidal surfaces, which are widely used in many optical systems due to their different symmetries and curvatures in the X and Y directions. For what is believed to be the first time, an asymmetrical optical lenslet array implemented by a spatial light modulator was presented to tackle the measurement challenge. This unconventional design approach has a great advantage to provide different optical powers in the X and Y directions so that focusing spots can be formed and captured on the detector plane for accurate centroid finding and precise wavefront evaluation for 3D shape reconstruction of the toroidal surface. A digital SHWS system with this extraordinary microlens array was built to verify the design concept, and the experimental results were presented and analyzed.
ISSN:0003-6935
2155-3165
1539-4522
DOI:10.1364/AO.47.006778