Nonlinear surface acoustic waves: Silicon strength in phonon-focusing directions

The anisotropy of the elastic properties of single-crystal silicon manifests itself in features of both the linear and nonlinear surface acoustic wave (SAW) propagation. Directions showing the phonon-focusing effect and strong nonlinearity were employed in contact-free and notch-free laser-based fra...

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Veröffentlicht in:	Ultrasonics 2008-11, Vol.48 (6), p.488-491
Hauptverfasser:	Kozhushko, Victor V., Hess, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Acoustics Applied sciences Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Nonlinear acoustics, macrosonics Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Ultrasonics, quantum acoustics, and physical effects of sound
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Zusammenfassung:	The anisotropy of the elastic properties of single-crystal silicon manifests itself in features of both the linear and nonlinear surface acoustic wave (SAW) propagation. Directions showing the phonon-focusing effect and strong nonlinearity were employed in contact-free and notch-free laser-based fracture experiments, yielding the intrinsic strength of silicon. The critical tensile stress values vary between 2.5 GPa and 7 GPa for the different crystallographic planes and directions of SAW propagation investigated.
ISSN:	0041-624X 1874-9968
DOI:	10.1016/j.ultras.2008.05.006