Fabrication of surface-structure controlled photopatterns upon transparent silica-acryl nanohybrid films with enhanced thermal and mechanical properties

Organic-inorganic nanohybrid materials were successfully fabricated from organically modified colloidal-silica nanoparticles synthesized through the sol-gel process and using the modified acryl resin. The materials exhibited the simple solution-processible film formation and high transmittance of above 90% in the visible wavelength regions. The materials were used for the fabrication of various patterns using the photolithography. We could simply fabricate the photopatterns and easily control the surface structures by changing the content of organically modified colloidal-silica nanoparticles. Also, the thermal and mechanical properties of the formed nanohybrid films could be efficiently enhanced through the synergistic combination of organically modified colloidal-silica nanoparticles with the modified acryl resin.