Investigation of CdS thin films by a near-field microwave microprobe

Cadmium sulphide (CdS) thin films with different microstructures and morphologies were measured by using a near-field microwave microprobe (NFMM). The NFMM system was coupled to a dielectric resonator with a distance regulation system at an operating frequency f=4.1 GHz. The changes in dielectric permittivity of CdS thin films due to different annealing temperatures were investigated by measuring the reflection coefficient S 11. CdS thin films with different microstructures and morphology were characterized by X-ray diffraction, atomic force microscopy and NFMM.