Floating Tip Nanolithography
We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of ∼20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (a...
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Veröffentlicht in: | Nano letters 2008-07, Vol.8 (7), p.2017-2022 |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of ∼20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (at ambient conditions) 1−4 nanometers above the surface without touching it. Field enhancement at the tip−sample gap or high tip temperature are identified as the causes of material ablation. |
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ISSN: | 1530-6984 1530-6992 |
DOI: | 10.1021/nl801203c |