Floating Tip Nanolithography

We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of ∼20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Nano letters 2008-07, Vol.8 (7), p.2017-2022
Hauptverfasser: Milner, Alexander A, Zhang, Kaiyin, Prior, Yehiam
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We demonstrate noncontact, high quality surface modification of soft and hard materials with spatial resolution of ∼20 nm. The nanowriting is based on the interaction between the surface and the tip of a standard atomic force microscope illuminated by a focused femtosecond laser beam and hovering (at ambient conditions) 1−4 nanometers above the surface without touching it. Field enhancement at the tip−sample gap or high tip temperature are identified as the causes of material ablation.
ISSN:1530-6984
1530-6992
DOI:10.1021/nl801203c