Fabrication of Nanopores in Silicon Chips Using Feedback Chemical Etching
Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabric...
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| Veröffentlicht in: | Small (Weinheim an der Bergstrasse, Germany) Germany), 2007-01, Vol.3 (1), p.116-119 |
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| creator | Park, Sang Ryul Peng, Hongbo Ling, Xinsheng S. |
| description | Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabricating solid‐state nanopores for detecting and characterizing biomolecules. |
| doi_str_mv | 10.1002/smll.200600268 |
| format | Article |
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| ispartof | Small (Weinheim an der Bergstrasse, Germany), 2007-01, Vol.3 (1), p.116-119 |
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| language | eng |
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| source | Wiley Online Library - AutoHoldings Journals; MEDLINE |
| subjects | biosensors chemical etching Crystallization - methods electrochemical methods Electrochemistry - methods Macromolecular Substances - chemistry Materials Testing Molecular Conformation nanopores Nanostructures - chemistry Nanostructures - ultrastructure Nanotechnology - methods Particle Size Porosity silicon Silicon - chemistry Surface Properties |
| title | Fabrication of Nanopores in Silicon Chips Using Feedback Chemical Etching |
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