Fabrication of Nanopores in Silicon Chips Using Feedback Chemical Etching

Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabric...

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Veröffentlicht in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2007-01, Vol.3 (1), p.116-119
Hauptverfasser: Park, Sang Ryul, Peng, Hongbo, Ling, Xinsheng S.
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Sprache:eng
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Zusammenfassung:Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabricating solid‐state nanopores for detecting and characterizing biomolecules.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.200600268