Fabrication of Nanopores in Silicon Chips Using Feedback Chemical Etching
Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabric...
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Veröffentlicht in: | Small (Weinheim an der Bergstrasse, Germany) Germany), 2007-01, Vol.3 (1), p.116-119 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabricating solid‐state nanopores for detecting and characterizing biomolecules. |
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ISSN: | 1613-6810 1613-6829 |
DOI: | 10.1002/smll.200600268 |