Analysis of submicron particles by scanning electron microscopy-energy-dispersive X-ray spectrometry-accuracy of size measurement

Scanning electron microscopy combined with energy‐dispersive x‐ray spectrometry (SEM‐EDXS) is widely used for particle analysis. In the case of submicron particles, especially for particles that are smaller than 300 nm, the measured particle size is influenced by specimen preparation, SEM operating...

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Veröffentlicht in:	Scanning 2006-09, Vol.28 (5), p.282-288
Hauptverfasser:	Mitsche, S., Poelt, P., Wagner, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	aerosols metrology scanning electron microscopy size measurement submicron particles
Online-Zugang:	Volltext
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