Analysis of submicron particles by scanning electron microscopy-energy-dispersive X-ray spectrometry-accuracy of size measurement

Scanning electron microscopy combined with energy‐dispersive x‐ray spectrometry (SEM‐EDXS) is widely used for particle analysis. In the case of submicron particles, especially for particles that are smaller than 300 nm, the measured particle size is influenced by specimen preparation, SEM operating parameters, the mean atomic number of the particles, and the threshold value used for binarization. The use of uncoated particles on a conductive substrate and image acquisition using an in‐lens detector are recommended for precise morphologic results in this size range.