Azide reactions for controlling clean silicon surface chemistry: benzylazide on Si(100)-2 x 1

A combination of experimental and computational studies presents direct proof of a novel reaction pathway that delivers aromatic compounds onto a Si(100)-2 x 1 substrate. Benzylazide chemisorbs on a Si(100)-2 x 1 surface, and this chemisorption is followed by nitrogen elimination, leading to a stable surface adduct based on a Si-Si-N cyclic entity. This reaction occurs via a stable surface intermediate with the surface-bound nitrogen molecule stabilized by the presence of a neighboring aromatic group, which eventually releases nitrogen into the gas phase and forms the final product.