Guanidinate-Stabilized Monomeric Hafnium Amide Complexes as Promising Precursors for MOCVD of HfO2

Novel guanidinato complexes of hafnium [Hf{η2-(iPrN)2CNR2}2(NR2)2] (R2 = Et2, 1; Et, Me, 2; Me2, 3), synthesized by insertion reactions of N,N‘-diisopropylcarbodiimide into the M−N bonds of homologous hafnium amide complexes 1−3 and {[μ2-NC(NMe2)2][NC(NMe2)2]2HfCl}2 (4) using a salt metathesis reaction, are reported. Single-crystal X-ray diffraction analysis revealed that compounds 1−3 were monomers, while compound 4 was found to be a dimer. The observed fluxional behavior of compounds 1−3 was studied in detail using variable-temperature and two-dimensional NMR techniques. The thermal characteristics of compounds 1−3 seem promising for HfO2 thin films by vapor deposition techniques. Metal−organic chemical vapor deposition experiments with compound 2 as the precursor resulted in smooth, uniform, and stoichiometric HfO2 thin films at relatively low deposition temperatures. The basic properties of HfO2 thin films were characterized in some detail.