Wavelength‐ and energy‐dispersive Electron Probe Microanalysis (EPMA) measurements with non‐perpendicular incidence of the electron beam

Summary A database of 416 wavelength‐ and energy‐dispersive EPMA measurements on tilted specimens of NiAl, TiO2 and Ti3Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0° and 60° in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza96t program and the results of Monte Carlo simulations shows that up to 50° tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.