Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resona...

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Veröffentlicht in:	Nano letters 2006-06, Vol.6 (6), p.1155-1159
Hauptverfasser:	Buchine, Brent A, Hughes, William L, Degertekin, F. Levent, Wang, Zhong L
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Electrochemistry - instrumentation Electrochemistry - methods Electrodes Equipment Design Equipment Failure Analysis Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials Testing Nanostructures - chemistry Nanostructures - ultrastructure Particle Size Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Transducers Vibration Zinc Oxide - chemistry
Online-Zugang:	Volltext
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