Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resona...

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Veröffentlicht in:Nano letters 2006-06, Vol.6 (6), p.1155-1159
Hauptverfasser: Buchine, Brent A, Hughes, William L, Degertekin, F. Levent, Wang, Zhong L
Format: Artikel
Sprache:eng
Schlagworte:
Acoustics
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric, piezoelectric, ferroelectric and antiferroelectric materials
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Electrochemistry - instrumentation
Electrochemistry - methods
Electrodes
Equipment Design
Equipment Failure Analysis
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials Testing
Nanostructures - chemistry
Nanostructures - ultrastructure
Particle Size
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Transducers
Vibration
Zinc Oxide - chemistry
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Beschreibung
Zusammenfassung:In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt−Leedom−Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.
ISSN:1530-6984
1530-6992
DOI:10.1021/nl060351x