Atom and Ion Chemistry in Low Pressure Hydrogen DC Plasmas
The chemical composition of a low-pressure hydrogen dc plasma produced in a hollow cathode discharge has been measured and modeled. The concentrations of H atoms and of H+, H2 + and H3 + ions were determined with a combination of optical spectroscopic and mass spectrometric techniques, over the rang...
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| Veröffentlicht in: | The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory Molecules, spectroscopy, kinetics, environment, & general theory, 2006-05, Vol.110 (18), p.6060-6066 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | The chemical composition of a low-pressure hydrogen dc plasma produced in a hollow cathode discharge has been measured and modeled. The concentrations of H atoms and of H+, H2 + and H3 + ions were determined with a combination of optical spectroscopic and mass spectrometric techniques, over the range of pressures (p ∼0.008−0.2 mbar) investigated. The results were rationalized with the help of a zero-order kinetic model. A comparatively high fraction (∼0.1 ± 0.05) of H atoms, indicative of a relatively small wall recombination, was observed. Low ionization degrees ( |
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| ISSN: | 1089-5639 1520-5215 |
| DOI: | 10.1021/jp057182+ |