Experimental characterization of focusing by high-numerical-aperture zone plates
High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The fi...
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| Veröffentlicht in: | Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2006-03, Vol.23 (3), p.567-571 |
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| container_end_page | 571 |
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| container_issue | 3 |
| container_start_page | 567 |
| container_title | Journal of the Optical Society of America. A, Optics, image science, and vision |
| container_volume | 23 |
| creator | MENON, Rajesh GIL, Dario SMITH, Henry I |
| description | High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations. |
| doi_str_mv | 10.1364/JOSAA.23.000567 |
| format | Article |
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| language | eng |
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| source | Optica Publishing Group Journals |
| subjects | Diffraction and scattering Exact sciences and technology Filters, zone plates, and polarizers Fundamental areas of phenomenology (including applications) Optical elements, devices, and systems Optics Physics Wave optics |
| title | Experimental characterization of focusing by high-numerical-aperture zone plates |
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