Experimental characterization of focusing by high-numerical-aperture zone plates

High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The fi...

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Veröffentlicht in:	Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2006-03, Vol.23 (3), p.567-571
Hauptverfasser:	MENON, Rajesh, GIL, Dario, SMITH, Henry I
Format:	Artikel
Sprache:	eng
Schlagworte:	Diffraction and scattering Exact sciences and technology Filters, zone plates, and polarizers Fundamental areas of phenomenology (including applications) Optical elements, devices, and systems Optics Physics Wave optics
Online-Zugang:	Volltext
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Zusammenfassung:	High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations.
ISSN:	1084-7529 1520-8532
DOI:	10.1364/JOSAA.23.000567