Analytic scaling analysis of high harmonic generation conversion efficiency

Closed form expressions for the high harmonic generation (HHG) conversion efficiency are obtained for the plateau and cutoff regions. The presented formulas eliminate most of the computational complexity related to HHG simulations, and enable a detailed scaling analysis of HHG efficiency as a function of drive laser parameters and material properties. Moreover, in the total absence of any fitting procedure, the results show excellent agreement with experimental data reported in the literature. Thus, this paper opens new pathways for the global optimization problem of extreme ultraviolet (EUV) sources based on HHG.