Experimental evaluation of the interference method of measurement of displacements on the basis of illumination of the surface of a test object

Experimental evaluation of the interference method of measurement of displacements on the basis of illumination of the surface of a test object

Results from experimental studies of a laser displacement measurement device that implements a new interference method of measurement based on illumination of the surface of a test object are presented.

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Veröffentlicht in:Measurement techniques 2008-10, Vol.51 (10), p.1085-1090
Hauptverfasser: Alekhin, V. E., Miroshnichenko, I. P., Serkin, A. G.
Format: Artikel
Sprache:eng
Schlagworte:
Analytical Chemistry
Characterization and Evaluation of Materials
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
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Beschreibung
Zusammenfassung:Results from experimental studies of a laser displacement measurement device that implements a new interference method of measurement based on illumination of the surface of a test object are presented.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-009-9166-x