Influence of Electrode Characteristics on DC Point-to-Plane Breakdown in High-Pressure Gaseous and Supercritical Carbon Dioxide

Discharges in supercritical conditions is a new field in plasma science. The supercritical phase has distinctive properties that may allow for unique plasma processing applications. In this paper, we study plasma generation in a point-to-plane geometry in the micrometer scale. The effects of needle...

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Veröffentlicht in:	IEEE transactions on plasma science 2009-06, Vol.37 (6), p.1078-1083
Hauptverfasser:	Lock, E.H., Saveliev, A.V., Kennedy, L.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Breakdown Carbon dioxide Circuits Density Electric breakdown Electric currents Electrodes Exact sciences and technology Fluid dynamics Gases Geometry Micrometers microplasma Nuclear and plasma sciences Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma Plasma applications Plasma density Plasma materials processing Plasma production and heating Plasma properties Plasma sources Plasma temperature supercritical fluid (SCF) Surface roughness Voltage
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Beschreibung
Zusammenfassung:	Discharges in supercritical conditions is a new field in plasma science. The supercritical phase has distinctive properties that may allow for unique plasma processing applications. In this paper, we study plasma generation in a point-to-plane geometry in the micrometer scale. The effects of needle characteristics, including tip diameter and plane electrode surface roughness, on discharge initiation are studied. The influence of pressure, temperature, and fluid density on breakdown voltage and reduced breakdown electric field are also investigated.
ISSN:	0093-3813 1939-9375
DOI:	10.1109/TPS.2009.2018844