Modeling and Simulation of a Micro-Actuator with Long-Travel
A microactuator with long-travel and high-resolution based on the principle of tribology is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic model of the micr...
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Veröffentlicht in: | Key engineering materials 2009-01, Vol.392-394, p.804-809 |
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creator | Jiang, W.R. Lu, Ze Sheng |
description | A microactuator with long-travel and high-resolution based on the principle of tribology
is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the
contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic
model of the microactuator is set up. The theory analysis on the dynamic character of the system is
carried out based on Karnopp “stick-slip” friction model. The physical and mathematical model of
the drive part and transmission part are set up respectively by the method of modularization. The
transfer function of the system is attained. The tacking simulation is carried out based on fuzzy
control with speed change integral, the result is proved that error is 0.004μm. |
doi_str_mv | 10.4028/www.scientific.net/KEM.392-394.804 |
format | Article |
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is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the
contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic
model of the microactuator is set up. The theory analysis on the dynamic character of the system is
carried out based on Karnopp “stick-slip” friction model. The physical and mathematical model of
the drive part and transmission part are set up respectively by the method of modularization. The
transfer function of the system is attained. The tacking simulation is carried out based on fuzzy
control with speed change integral, the result is proved that error is 0.004μm.</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.392-394.804</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><ispartof>Key engineering materials, 2009-01, Vol.392-394, p.804-809</ispartof><rights>2009 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c306t-81d313063827d2c6d018cd8fff51314fc4360e42261a03a67b43938c8c97d6db3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/760?width=600</thumbnail><link.rule.ids>314,777,781,27905,27906</link.rule.ids></links><search><creatorcontrib>Jiang, W.R.</creatorcontrib><creatorcontrib>Lu, Ze Sheng</creatorcontrib><title>Modeling and Simulation of a Micro-Actuator with Long-Travel</title><title>Key engineering materials</title><description>A microactuator with long-travel and high-resolution based on the principle of tribology
is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the
contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic
model of the microactuator is set up. The theory analysis on the dynamic character of the system is
carried out based on Karnopp “stick-slip” friction model. The physical and mathematical model of
the drive part and transmission part are set up respectively by the method of modularization. The
transfer function of the system is attained. The tacking simulation is carried out based on fuzzy
control with speed change integral, the result is proved that error is 0.004μm.</description><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNqVkE1LAzEQhhdRsFb_w548CNnmY5tmwUut9QNbPFjPIc1Hm7JNapJ18d8bqeDZwzBzeOdh5imKGwSrGmI26vu-itJql6yxsnI6jV7my4o0GJCmrhisT4oBohSDZtKMT_MMEQENw_S8uIhxByFBDI0Hxe3SK91atymFU-Wb3XetSNa70ptSlEsrgwdTmTqRfCh7m7blwrsNWAXxqdvL4syINuqr3z4s3h_mq9kTWLw-Ps-mCyAJpAkwpAjKE2F4orCkCiImFTPGjBFBtZE1oVDXGFMkIBF0sq5JQ5hkspkoqtZkWFwfuYfgPzodE9_bKHXbCqd9F3lehxg3LAfvjsF8doxBG34Idi_CF0eQ_4jjWRz_E8ezOJ7F8SwuV82zuAy5P0JSEC4mLbd857vg8of_wXwDAbt_4A</recordid><startdate>20090101</startdate><enddate>20090101</enddate><creator>Jiang, W.R.</creator><creator>Lu, Ze Sheng</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20090101</creationdate><title>Modeling and Simulation of a Micro-Actuator with Long-Travel</title><author>Jiang, W.R. ; Lu, Ze Sheng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c306t-81d313063827d2c6d018cd8fff51314fc4360e42261a03a67b43938c8c97d6db3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jiang, W.R.</creatorcontrib><creatorcontrib>Lu, Ze Sheng</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Key engineering materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jiang, W.R.</au><au>Lu, Ze Sheng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling and Simulation of a Micro-Actuator with Long-Travel</atitle><jtitle>Key engineering materials</jtitle><date>2009-01-01</date><risdate>2009</risdate><volume>392-394</volume><spage>804</spage><epage>809</epage><pages>804-809</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><abstract>A microactuator with long-travel and high-resolution based on the principle of tribology
is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the
contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic
model of the microactuator is set up. The theory analysis on the dynamic character of the system is
carried out based on Karnopp “stick-slip” friction model. The physical and mathematical model of
the drive part and transmission part are set up respectively by the method of modularization. The
transfer function of the system is attained. The tacking simulation is carried out based on fuzzy
control with speed change integral, the result is proved that error is 0.004μm.</abstract><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/KEM.392-394.804</doi><tpages>6</tpages></addata></record> |
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title | Modeling and Simulation of a Micro-Actuator with Long-Travel |
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