Modeling and Simulation of a Micro-Actuator with Long-Travel

A microactuator with long-travel and high-resolution based on the principle of tribology is presented, which stroke is up to 300mm and displacement resolution is 0.01μm. It resolves the contradiction of large-stroke and high-resolution in macro/micro drive successfully. The dynamic model of the microactuator is set up. The theory analysis on the dynamic character of the system is carried out based on Karnopp “stick-slip” friction model. The physical and mathematical model of the drive part and transmission part are set up respectively by the method of modularization. The transfer function of the system is attained. The tacking simulation is carried out based on fuzzy control with speed change integral, the result is proved that error is 0.004μm.