Micropore modification in InP

The structural features and optical properties of microporous InP substrates used for epitaxial overgrowth of thin films have been investigated. Both crystalographically oriented (CO) and current line oriented (CLO) pore networks were created by electrochemical dissolution. Heat treatment of the InP pores converted them into microcavities maintaining the same crystallographic direction. The effect of phosphorus vapour pressure was proved to be crucial for the microcavity formation, since it influences the mass transport during heat treatment. Electron microscopy and photoluminescence experiments revealed the absence of significant extended defects, both after the pore and cavities formation. The capability of improved structural quality homo‐ and hetero‐epitaxial overgrown films on the porous InP, was also demonstrated. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)