Simulation and Analysis of Cross Sensitivity of Eight-cantilever Silicon Micro Accelerometer
The MEMS's part-cross sensitivity of eight-cantilever silicon micro accelerometers was simulated by ANSYS software. In the simulation, the acceleration was added on each axis respectively, the output of two different axles was analyzed and the cross sensitivity can be obtained. According to the...
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| Veröffentlicht in: | Danjian yu Zhidao Xuebao / Journal of Projectiles, Rockets, Missiles and Guidance Rockets, Missiles and Guidance, 2008-08, Vol.28 (4), p.295-297 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | chi |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | The MEMS's part-cross sensitivity of eight-cantilever silicon micro accelerometers was simulated by ANSYS software. In the simulation, the acceleration was added on each axis respectively, the output of two different axles was analyzed and the cross sensitivity can be obtained. According to the simulation, the resistance change can be calculated out, if the stress of the beam of each output axis correspondence is calculated in the simulation, thus an output voltage of output axis can be figured out. |
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| ISSN: | 1673-9728 |