Finite element simulation of micro-imprinting in Mg–Cu–Y amorphous alloy

Mg–Cu–Y-based metallic glasses have exhibited superior glass-forming ability, and can be cast into bulk metallic glasses (BMGs). At temperatures above the glass transition temperature, the BMGs become supercooled viscous materials that can be formed into complicated shapes or patterns on micro- or even nano-scales. This paper presents the simulated forming evolution, using a finite element simulation software DEFORM 3D, and the experimental observations for the micro-imprinting of the Mg 58Cu 31Y 11 BMGs for making hexagonal micro-lens arrays. The results demonstrate that the imprinting is feasible and promising.