Studies and correlation among the structural, optical and electrical parameters of spray-deposited tin oxide (SnO 2) thin films with different substrate temperatures

Thin films of tin oxide (SnO 2) have been grown by using a simple and economical spray pyrolysis technique. The deposition temperature was optimized to 450 °C, while the concentration and quantity of the solution were kept fixed at 2 M and 20 ml, respectively. X-ray diffraction patterns (XRD) studie...

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Veröffentlicht in:Physica. B, Condensed matter Condensed matter, 2008-10, Vol.403 (19), p.3724-3729
Hauptverfasser: Kasar, R.R., Deshpande, N.G., Gudage, Y.G., Vyas, J.C., Sharma, Ramphal
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container_end_page 3729
container_issue 19
container_start_page 3724
container_title Physica. B, Condensed matter
container_volume 403
creator Kasar, R.R.
Deshpande, N.G.
Gudage, Y.G.
Vyas, J.C.
Sharma, Ramphal
description Thin films of tin oxide (SnO 2) have been grown by using a simple and economical spray pyrolysis technique. The deposition temperature was optimized to 450 °C, while the concentration and quantity of the solution were kept fixed at 2 M and 20 ml, respectively. X-ray diffraction patterns (XRD) studies reveal that the material deposited is polycrystalline SnO 2 having primitive tetragonal structure. The lattice parameters, grain size, microstrain and dislocation densities were calculated and correlated with the substrate temperature. The transmission spectra showed a sharp decrease in transmission at the absorption edge and a good form of interference pattern. The figure of merit has been calculated from transmission spectra. Low sheet resistance ∼16.03 Ω/sq cm and high visible transmission (∼86%) were obtained when the films were deposited at the substrate temperature of 450 °C. From electrical measurements, the resistivity was found to be 11.5×10 −4 Ω cm, while the carrier concentration was calculated to be 8.81×10 21 cm −3.
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The deposition temperature was optimized to 450 °C, while the concentration and quantity of the solution were kept fixed at 2 M and 20 ml, respectively. X-ray diffraction patterns (XRD) studies reveal that the material deposited is polycrystalline SnO 2 having primitive tetragonal structure. The lattice parameters, grain size, microstrain and dislocation densities were calculated and correlated with the substrate temperature. The transmission spectra showed a sharp decrease in transmission at the absorption edge and a good form of interference pattern. The figure of merit has been calculated from transmission spectra. Low sheet resistance ∼16.03 Ω/sq cm and high visible transmission (∼86%) were obtained when the films were deposited at the substrate temperature of 450 °C. 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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport phenomena in thin films and low-dimensional structures
Exact sciences and technology
Figure of merit
Hall effect measurements
Low-field transport and mobility
piezoresistance
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Other semiconductors
Physics
Spray pyrolysis
Structural analysis
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Tin oxide
Transmittance spectra
title Studies and correlation among the structural, optical and electrical parameters of spray-deposited tin oxide (SnO 2) thin films with different substrate temperatures
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