Studies and correlation among the structural, optical and electrical parameters of spray-deposited tin oxide (SnO 2) thin films with different substrate temperatures

Thin films of tin oxide (SnO 2) have been grown by using a simple and economical spray pyrolysis technique. The deposition temperature was optimized to 450 °C, while the concentration and quantity of the solution were kept fixed at 2 M and 20 ml, respectively. X-ray diffraction patterns (XRD) studies reveal that the material deposited is polycrystalline SnO 2 having primitive tetragonal structure. The lattice parameters, grain size, microstrain and dislocation densities were calculated and correlated with the substrate temperature. The transmission spectra showed a sharp decrease in transmission at the absorption edge and a good form of interference pattern. The figure of merit has been calculated from transmission spectra. Low sheet resistance ∼16.03 Ω/sq cm and high visible transmission (∼86%) were obtained when the films were deposited at the substrate temperature of 450 °C. From electrical measurements, the resistivity was found to be 11.5×10 −4 Ω cm, while the carrier concentration was calculated to be 8.81×10 21 cm −3.