In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films

Using in situ synchrotron X‐ray grazing incidence scattering experiments we investigated FePt islands mediated by Ag. FePt has been deposited by DC‐magnetron sputtering on amorphous Si/SiO2 substrate at 400 °C, to support the formation of the hard ferromagnetic L10‐FePt phase during growth. The sequ...

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Veröffentlicht in:Advanced engineering materials 2009-06, Vol.11 (6), p.478-482
Hauptverfasser: Cantelli, Valentina, von Borany, Johannes, Jeutter, Nicole Martha, Grenzer, Jörg
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container_title Advanced engineering materials
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creator Cantelli, Valentina
von Borany, Johannes
Jeutter, Nicole Martha
Grenzer, Jörg
description Using in situ synchrotron X‐ray grazing incidence scattering experiments we investigated FePt islands mediated by Ag. FePt has been deposited by DC‐magnetron sputtering on amorphous Si/SiO2 substrate at 400 °C, to support the formation of the hard ferromagnetic L10‐FePt phase during growth. The sequential Ag/FePt deposition provides separated FePt nanoislands without magnetic property degradation. We obtained magnetic moments preferentially oriented parallel to layer surface.
doi_str_mv 10.1002/adem.200800332
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
DC-magnetron sputtering
Deposition by sputtering
Exact sciences and technology
In situ X-ray scattering
Magnetic nano clusters
Magnetic properties and materials
Magnetic properties of monolayers and thin films
Magnetic properties of surface, thin films and multilayers
Materials science
Materials testing
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films
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