In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films

Using in situ synchrotron X‐ray grazing incidence scattering experiments we investigated FePt islands mediated by Ag. FePt has been deposited by DC‐magnetron sputtering on amorphous Si/SiO2 substrate at 400 °C, to support the formation of the hard ferromagnetic L10‐FePt phase during growth. The sequ...

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Veröffentlicht in:	Advanced engineering materials 2009-06, Vol.11 (6), p.478-482
Hauptverfasser:	Cantelli, Valentina, von Borany, Johannes, Jeutter, Nicole Martha, Grenzer, Jörg
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology DC-magnetron sputtering Deposition by sputtering Exact sciences and technology In situ X-ray scattering Magnetic nano clusters Magnetic properties and materials Magnetic properties of monolayers and thin films Magnetic properties of surface, thin films and multilayers Materials science Materials testing Methods of deposition of films and coatings film growth and epitaxy Physics
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Zusammenfassung:	Using in situ synchrotron X‐ray grazing incidence scattering experiments we investigated FePt islands mediated by Ag. FePt has been deposited by DC‐magnetron sputtering on amorphous Si/SiO2 substrate at 400 °C, to support the formation of the hard ferromagnetic L10‐FePt phase during growth. The sequential Ag/FePt deposition provides separated FePt nanoislands without magnetic property degradation. We obtained magnetic moments preferentially oriented parallel to layer surface.
ISSN:	1438-1656 1527-2648
DOI:	10.1002/adem.200800332