In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams

Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processi...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Applied surface science 2009-09, Vol.255 (24), p.9581-9584
Hauptverfasser:	Hayashi, Keiji, Tanaka, Daisuke, Araki, Harumi, Maruyama, Tomoki, Matsumura, Daisuke, Toyoda, Kazuho, Tsuji, Noriyuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology CW laser Exact sciences and technology In situ measurement Negative ion Neutral free-radical beam Physics Quantum device processing
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.
ISSN:	0169-4332 1873-5584
DOI:	10.1016/j.apsusc.2009.04.085