Mechanical properties of a-C, SiC and Ti-C: H films

a-C, a-SiC and Ti-C: H coatings were deposited on two steel substrates with different hardness by magnetron sputtering. Their mechanical properties were investigated by depth sensing indentation and dry sliding testing. Load – displacement curves were obtained using a NanoTest™ NT600 instrument equipped with a Berkovich indenter. The depth profiles of the mechanical properties (indentation hardness H, effective modulus E , and also and ratios) on both substrates are presented. The goal of this article is to compare the dependence of the real response of a coating/substrate system on the substrate. Regardless of substrate type the highest and the lowest values of hardness and modulus belong to a-C and Ti-C: H films, respectively.