Preparation of thin film YSZ electrolyte by using electrostatic spray deposition

Yttria-stabilized zirconia (YSZ) thin film was successfully deposited onto Ni–YSZ anode disk by the electrostatic spray deposition (ESD) technique. To deposit a dense YSZ thin film onto porous Ni–YSZ substrate, the influence of process parameter variables were examined. The relationship between process parameters and morphologies of YSZ films coated by ESD was investigated by means of SEM photography and X-ray diffraction (XRD). The result showed that dense YSZ film of average 10–15 μm thickness was deposited on the porous Ni–YSZ substrate with temperature of 400 °C, the precursor solution concentration of 0.05 M, nozzle-to-substrate distance of 30 mm, applied electric field of 18 kV, and deposition time of 90 min.