Detailed investigation of ultrasonic Al–Cu wire-bonds: I. Intermetallic formation in the as-bonded state
Scanning and transmission electron microscopy were used to study intermetallic formation and the interface morphology in copper wire-bonds. The ends of copper wires were melted in air and in a protective environment to form wire-balls. The protective environment enabled formation of symmetrical and...
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Veröffentlicht in: | Journal of materials science 2008-09, Vol.43 (18), p.6029-6037 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Scanning and transmission electron microscopy were used to study intermetallic formation and the interface morphology in copper wire-bonds. The ends of copper wires were melted in air and in a protective environment to form wire-balls. The protective environment enabled formation of symmetrical and relatively defect-free copper balls, together with a smaller heat affected zone (in comparison with wires melted in air). Detailed morphological and compositional characterization of the Al–Cu as-bonded interface was conducted using scanning and transmission electron microscopy, on specimens prepared by focused ion beam milling. Discontinuous and non-uniform intermetallics were found in regions where high localized stress was introduced during the wire-bonding process. The main intermetallic phase was found to be Al
2
Cu. |
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ISSN: | 0022-2461 1573-4803 |
DOI: | 10.1007/s10853-008-2954-x |