All solution-processed high-resolution bottom-contact transparent metal-oxide thin film transistors

We report all solution-processed high-resolution bottom-contact indium-gallium-zinc-oxide (IGZO) thin film transistors (TFTs) using a simple surface patterning and dip-casting process. High-resolution nanoparticulate Ag source/drain electrodes and a sol-gel processed IGZO semiconductor were deposite...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2009-06, Vol.42 (12), p.125102-125102p6
Hauptverfasser: Park, Sung Kyu, Kim, Yong-Hoon, Han, Jeong-In
Format: Artikel
Sprache:eng
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Zusammenfassung:We report all solution-processed high-resolution bottom-contact indium-gallium-zinc-oxide (IGZO) thin film transistors (TFTs) using a simple surface patterning and dip-casting process. High-resolution nanoparticulate Ag source/drain electrodes and a sol-gel processed IGZO semiconductor were deposited by a simple dip-casting along with a photoresist-free, non-relief-pattern lithographic process. The deposited Ag and IGZO solution can be steered into the desired hydrophilic areas by a low surface energy self-assembled monolayer, resulting in source/drain electrodes and semiconducting layer, respectively. The all solution-processed bottom-contact IGZO TFTs including a channel length of 10 mum typically showed a mobility range 0.05-0.2 cm(2) V(-1) s(-1) with an on/off ratio of more than 10(6).
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/42/12/125102