Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous c...

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Veröffentlicht in:	IEEE photonics technology letters 2008-05, Vol.20 (10), p.851-853
Hauptverfasser:	Jia-Sheng Ye, Matsuyama, N., Kanamori, Y., Hane, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Etching Fabrication Gratings Guided mode resonance Mathematical analysis micro- and nanolithography technologies microoptical filter Nanocomposites Nanolithography Nanomaterials Nanostructure Optical filters Photonic crystals Photonics Reflectivity Resonance rigorous coupled wave method Silicon Silicon on insulator technology Silicon substrates Slabs Wafers
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