Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer

Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous c...

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Veröffentlicht in:IEEE photonics technology letters 2008-05, Vol.20 (10), p.851-853
Hauptverfasser: Jia-Sheng Ye, Matsuyama, N., Kanamori, Y., Hane, K.
Format: Artikel
Sprache:eng
Schlagworte:
Etching
Fabrication
Gratings
Guided mode resonance
Mathematical analysis
micro- and nanolithography technologies
microoptical filter
Nanocomposites
Nanolithography
Nanomaterials
Nanostructure
Optical filters
Photonic crystals
Photonics
Reflectivity
Resonance
rigorous coupled wave method
Silicon
Silicon on insulator technology
Silicon substrates
Slabs
Wafers
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Beschreibung
Zusammenfassung:In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous coupled wave method prove to be in agreement with the experimental observations.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2008.921840