Fabrication of antireflection structures on TCO film for reflective liquid crystal display

The cholesteric liquid crystals display (ChLCD) is one kind of reflective liquid crystal display, the antireflective layer on its transparent conduction oxides (TCO) film is needed for good contrast and color performance. In this study, the finite difference time domain (FDTD) simulation and nanoimp...

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Veröffentlicht in:	Microelectronic engineering 2009-04, Vol.86 (4), p.628-631
Hauptverfasser:	Chou, Ta-Hsin, Cheng, Kuei-Yuan, Chang, Tien-Li, Ting, Chia-Jen, Hsu, Hsiu-Chen, Wu, Chin-Jyi, Tsai, Jen-Hui, Huang, Tzn-Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Antireflection Applied sciences Display Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Nanoimprint Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transparent conduction oxides film
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Beschreibung
Zusammenfassung:	The cholesteric liquid crystals display (ChLCD) is one kind of reflective liquid crystal display, the antireflective layer on its transparent conduction oxides (TCO) film is needed for good contrast and color performance. In this study, the finite difference time domain (FDTD) simulation and nanoimprinting fabrication of AR structures on the TCO film are developed. Finally, the reflectance of AR structures on TCO film is just half of the original film, and this result is useful for the reflective ChLCD product commercialized in the future.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2009.01.067