Noise and reliability measurement of a three-axis micro-accelerometer

A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dep...

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Veröffentlicht in:	Microelectronic engineering 2009-04, Vol.86 (4), p.991-995
Hauptverfasser:	Mohd-Yasin, F., Zaiyadi, N., Nagel, D.J., Ong, D.S., Korman, C.E., Faidz, A.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Low frequency noise measurement Microelectronic fabrication (materials and surfaces technology) Reliability Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Three-axis accelerometer
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Beschreibung
Zusammenfassung:	A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2008.12.045