Moulding of arrowhead structures

Micron-sized dot-like arrowhead structures were replicated by moulding with an elastomer. In order to address the impact of prepolymer viscosity on stamp filling of the structures and the impact of elasticity on stamp separation of these structures three different PDMS materials were investigated. T...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Microelectronic engineering 2009-04, Vol.86 (4), p.608-610
Hauptverfasser: Möllenbeck, S., Bogdanski, N., Scheer, H.-C., Zajadacz, J., Zimmer, K.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Micron-sized dot-like arrowhead structures were replicated by moulding with an elastomer. In order to address the impact of prepolymer viscosity on stamp filling of the structures and the impact of elasticity on stamp separation of these structures three different PDMS materials were investigated. The moulding results obtained for different geometries of the arrowhead structures were evaluated with respect to typical defects. The results could be well understood in view of the material properties derived from simple characterisation measurements. Sylgard 184 provided the best replication results.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2008.12.035