Carbon dust formation in a cold plasma from cathode sputtering

Nanoparticles are produced in argon glow plasmas where carbon is introduced by sputtering of a graphite cathode. A scaling law of growth is reported on as a function of the discharge time. Two successive stages of growth of concomitant agglomeration and carbon deposition are observed, followed by a...

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Veröffentlicht in:Journal of nuclear materials 2009-06, Vol.390, p.140-143
Hauptverfasser: Arnas, C., Mouberi, A., Hassouni, K., Michau, A., Lombardi, G., Bonnin, X., Bénédic, F., Pégourié, B.
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Sprache:eng
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Zusammenfassung:Nanoparticles are produced in argon glow plasmas where carbon is introduced by sputtering of a graphite cathode. A scaling law of growth is reported on as a function of the discharge time. Two successive stages of growth of concomitant agglomeration and carbon deposition are observed, followed by a final stage of growth by carbon deposition. A model of formation of molecular precursors by coagulation of neutral clusters on the one hand and of neutral-negative clusters on the other hand is presented, based on formation enthalpy and cluster geometry.
ISSN:0022-3115
1873-4820
DOI:10.1016/j.jnucmat.2009.01.148