An Analytical Model of an OCVD-Based Measurement Technique of the Local Carrier Lifetime
A model of a new technique to measure the spatial distribution of the majority and minority carrier lifetime along epilayers is presented. Being in good agreement with simulations, this model clarifies the behavior of the test structure used in the technique and gives a physical interpretation of th...
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Veröffentlicht in: | IEEE transactions on electron devices 2007-11, Vol.54 (11), p.2998-3006 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A model of a new technique to measure the spatial distribution of the majority and minority carrier lifetime along epilayers is presented. Being in good agreement with simulations, this model clarifies the behavior of the test structure used in the technique and gives a physical interpretation of the measured quantities. |
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ISSN: | 0018-9383 1557-9646 |
DOI: | 10.1109/TED.2007.907162 |