Low Frequency Noises Of Hydrogen Sensors On The Base Of Silicon Having Nano-Pores Layer

Low Frequency Noises Of Hydrogen Sensors On The Base Of Silicon Having Nano-Pores Layer

Sensors have sandwich structure metal/porous silicon/crystalline silicon/Al. The contact metal on porous silicon was from Au and from Pd. Porosity of the samples is 57% and 63%. Low frequency noises before, during and after influence of hydrogen gas flow are studied. Noise spectra of the samples in...

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Bibliographische Detailangaben
Hauptverfasser: Mkhitaryan, Z H, Gasparyan, F V, Surmalyan, A V
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Sensors have sandwich structure metal/porous silicon/crystalline silicon/Al. The contact metal on porous silicon was from Au and from Pd. Porosity of the samples is 57% and 63%. Low frequency noises before, during and after influence of hydrogen gas flow are studied. Noise spectra of the samples in general have 1/fg forms with 0.7'g'1.
ISSN:0094-243X
DOI:10.1063/1.3140413