High aspect ratio diamond microelectrode array for neuronal activity measurements

Diamond exhibits several attractive properties for bio-sensing applications. In particular its high bio inertness, high electrochemical stability, and optical transparency provide diamond with high interests for neural activity study. The purpose of this study is the realisation of microelectrodes arrays (MEA) in diamond for neurons slices study. Due to a cellular lysis on the edge of the tissue slices studied, electrodes have to be at least 60 μm in height even though the electrode surface has to be minimised in order to achieve good signal noise rate. Silicon MEA with metal contacts were realised using (Deep Reactive Ion Etching) DRIE and coated with Nanocrystaline Diamond (NCD) using (Bias Enhanced Nucleation) BEN technique. We focus the study on the understanding of the BEN nucleation process on such high aspect ratio electrodes. Several parameters such as slope of the substrate, conductivity and chemical nature of the substrate were studied in order to enable selective nucleation necessary to fabricate diamond MEAs. The study leads to the optimised development of a processing route enabling the selective coating of the active tips of high aspect ratio MEAs without altering the electrical insulation between probes.