CMP properties and fabrication of OLED using MEH-PPV

The interface between the electrode and organic layer in organic light emitting diode (OLED) has been reported as an important factor to influence the electrical and luminescent properties. Indium tin oxide (ITO) is commonly used as the anode material. ITO thin film has been deposited on glass substrate by radio frequency (RF) magnetron sputtering. And it was used as an anode contact to fabricate OLED device. The OLED devices with ITO/MEH‐PPV [2‐methoxy‐5‐(2‐ethylhexyloxy)‐p‐phenylenevinylene]/Al configuration were fabricated by thermal evaporation and spin coating, respectively. We investigated the electrical, structural and optical properties of ITO thin film, which was measured using the methods of atomic force microscope (AFM), field‐emission scanning electron microscope (FESEM) and ultraviolet–visible (UV–VIS) spectrophotometer. The interface property between ITO thin film and MEH‐PPV was improved as the surface of ITO thin film was smoothed and photoluminescence (PL) intensity was increased in the 680 nm range. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)