UV nanoimprint using flexible polymer template and substrate
Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized...
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Veröffentlicht in: | Microelectronic engineering 2009-03, Vol.86 (3), p.295-298 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6
in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2008.09.044 |