UV nanoimprint using flexible polymer template and substrate

Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized...

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Veröffentlicht in:Microelectronic engineering 2009-03, Vol.86 (3), p.295-298
Hauptverfasser: Hong, Sung-Hoon, Hwang, Jae-Yeon, Lee, Heon, Lee, Hee-Chul, Choi, Kyung-Woo
Format: Artikel
Sprache:eng
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Zusammenfassung:Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2008.09.044