XPS survey spectra simulation of nano-structured surfaces

We have developed a software tool for the generation of survey spectra in X‐ray photoelectron spectroscopy (GOSSIP) to simulate wide spectra in the range 200–1500 eV from nano‐structured surfaces. It is based on linear combination of delta layers spectra with the atomic spectra of the elements or compounds of the surface to be simulated. The set of delta layers to reproduce any model is a 200‐file database of thin layers regularly buried up to a depth of 40 nm and has been generated with QUASES™. The atomic spectra that constitute a second database have themselves been determined with QUASES™ from experimental spectra of the elements or compounds in pure form. The principle of GOSSIP is described. Then the generation process is validated by comparison with experimental data for simple rectangular in‐depth distribution of elements. Copyright © 2009 John Wiley & Sons, Ltd.