GISAXS Size Distribution Characterization of Cu Nanoparticles Embedded in silica

Cu nanoparticles embedded in high purity silica produced by deep ion implantation at 2 MeV and located around 0.8 mum underneath the surface were analyzed by GISAXS and TEM. Same results were obtained by both techniques, indicating that GISAXS is a reliable method for shape and size characterization...

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Hauptverfasser: Pena-Rodriguez, Ovidio, Rodriguez-Fernandez, Luis, Rodriguez-Iglesias, Vladimir, Kellermann, Guinther, Crespo-Sosa, Alejandro, Cheang-Wong, Juan Carlos, Arenas-Alatorre, Jesus, Oliver, Alicia
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Cu nanoparticles embedded in high purity silica produced by deep ion implantation at 2 MeV and located around 0.8 mum underneath the surface were analyzed by GISAXS and TEM. Same results were obtained by both techniques, indicating that GISAXS is a reliable method for shape and size characterization of metallic nanoclusters underneath the surface of a silica matrix. The Cu nanoparticles presented a nearly-spherical shape with a mean radius around 3+/-1.2 nm.
ISSN:0094-243X
DOI:10.1063/1.3086216