GISAXS Size Distribution Characterization of Cu Nanoparticles Embedded in silica
Cu nanoparticles embedded in high purity silica produced by deep ion implantation at 2 MeV and located around 0.8 mum underneath the surface were analyzed by GISAXS and TEM. Same results were obtained by both techniques, indicating that GISAXS is a reliable method for shape and size characterization...
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Format: | Tagungsbericht |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Cu nanoparticles embedded in high purity silica produced by deep ion implantation at 2 MeV and located around 0.8 mum underneath the surface were analyzed by GISAXS and TEM. Same results were obtained by both techniques, indicating that GISAXS is a reliable method for shape and size characterization of metallic nanoclusters underneath the surface of a silica matrix. The Cu nanoparticles presented a nearly-spherical shape with a mean radius around 3+/-1.2 nm. |
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ISSN: | 0094-243X |
DOI: | 10.1063/1.3086216 |