Extended use of turbomolecular vacuum pumps by coatings
Turbomolecular-pumps (TMP) can be used for suction of gas in a wide range of pressure. Limitations are primarily due to thermal and chemical capacity especially of the highly loaded pumping rotor. Prospects and limits to extend application fields by use of adequate functional coatings are reported.
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| Veröffentlicht in: | Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten Oberflèachen und Dünne Schichten, 2008-06, Vol.20 (3), p.20-28 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Turbomolecular-pumps (TMP) can be used for suction of gas in a wide range of pressure. Limitations are primarily due to thermal and chemical capacity especially of the highly loaded pumping rotor. Prospects and limits to extend application fields by use of adequate functional coatings are reported. |
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| ISSN: | 0947-076X 1522-2454 |
| DOI: | 10.1002/vipr.200800352 |