The fabrication of silicon-based PZT microstructures using an aerosol deposition method

This paper presents a series of processes for fabricating lead-zirconate-titanate (PZT) microstructures on a silicon substrate. An aerosol deposition method was used to deposit PZT thick film at room temperature. The low temperature deposition enabled a special lift-off process for patterning thick...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2008-05, Vol.18 (5), p.055034-055034 (7)
Hauptverfasser:	Wang, Xuan-Yu, Lee, Chi-Yuan, Hu, Yuh-Chung, Shih, Wen-Pin, Lee, Chih-Cheng, Huang, Jung-Tang, Chang, Pei-Zen
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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